X-ray diffraction analysis of superlattices grown on misoriented substrates

P. Ravila; V. M. Airaksinen; H. Lipsanen; T. Tuomi; P. A. Claxton

doi:10.1016/0022-0248(91)90402-Q

X-ray diffraction analysis of superlattices grown on misoriented substrates

P. Ravila^*, V. M. Airaksinen, H. Lipsanen, T. Tuomi, P. A. Claxton

^*Tämän työn vastaava kirjoittaja

Univ Sheffield, University of Sheffield, Dept Chem & Biol Engn

Tutkimustuotos: Lehtiartikkeli › Article › Scientific › vertaisarvioitu

8 Sitaatiot (Scopus)

Abstrakti

X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an In_xGa_1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.

Alkuperäiskieli	Englanti
Sivut	569-572
Sivumäärä	4
Julkaisu	Journal of Crystal Growth
Vuosikerta	114
Numero	4
DOI - pysyväislinkit	https://doi.org/10.1016/0022-0248(91)90402-Q
Tila	Julkaistu - 1 jouluk. 1991
OKM-julkaisutyyppi	A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

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10.1016/0022-0248(91)90402-Q

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title = "X-ray diffraction analysis of superlattices grown on misoriented substrates",

abstract = "X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.",

author = "P. Ravila and Airaksinen, {V. M.} and H. Lipsanen and T. Tuomi and Claxton, {P. A.}",

year = "1991",

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doi = "10.1016/0022-0248(91)90402-Q",

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T1 - X-ray diffraction analysis of superlattices grown on misoriented substrates

AU - Ravila, P.

AU - Airaksinen, V. M.

AU - Lipsanen, H.

AU - Tuomi, T.

AU - Claxton, P. A.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.

AB - X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.

UR - http://www.scopus.com/inward/record.url?scp=0026383218&partnerID=8YFLogxK

U2 - 10.1016/0022-0248(91)90402-Q

DO - 10.1016/0022-0248(91)90402-Q

M3 - Article

AN - SCOPUS:0026383218

SN - 0022-0248

VL - 114

SP - 569

EP - 572

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 4

ER -

X-ray diffraction analysis of superlattices grown on misoriented substrates

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