Wireless MEMS sensor and method of reading the same

Heikki Seppae; Ville Viikari; Heikki Seppä

Wireless MEMS sensor and method of reading the same

Heikki Seppae (Keksijä), Ville Viikari (Keksijä), Heikki Seppä (Keksijä)

Ei julkaistu Aalto-yliopiston affiliaatiolla

Tutkimustuotos: Patentti › Patent

Abstrakti

This document describes a wireless sensor comprising a MEMS resonator and an antenna directly matched thereto. Also a method of reading the wireless sensor is described. The method comprises illuminating the wireless sensor with electromagnetic energy at a first and second frequencies and receiving an intermodulation signal emitted by the wireless sensor in response to said electromagnetic energy at the first and second frequencies.

Alkuperäiskieli	Englanti
Patenttinumero	US2012176609
IPC	H01L 29/ 84 A I
Prioriteetti päiväys	10/09/2010
Tila	Julkaistu - 12 heinäkuuta 2012
OKM-julkaisutyyppi	H1 Myönnetyt patentit

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title = "Wireless MEMS sensor and method of reading the same",

abstract = "This document describes a wireless sensor comprising a MEMS resonator and an antenna directly matched thereto. Also a method of reading the wireless sensor is described. The method comprises illuminating the wireless sensor with electromagnetic energy at a first and second frequencies and receiving an intermodulation signal emitted by the wireless sensor in response to said electromagnetic energy at the first and second frequencies.",

author = "Heikki Seppae and Ville Viikari and Heikki Sepp{\"a}",

year = "2012",

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day = "12",

language = "English",

type = "Patent",

note = "US2012176609; H01L 29/ 84 A I",

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T1 - Wireless MEMS sensor and method of reading the same

AU - Seppae, Heikki

AU - Viikari, Ville

AU - Seppä, Heikki

PY - 2012/7/12

Y1 - 2012/7/12

N2 - This document describes a wireless sensor comprising a MEMS resonator and an antenna directly matched thereto. Also a method of reading the wireless sensor is described. The method comprises illuminating the wireless sensor with electromagnetic energy at a first and second frequencies and receiving an intermodulation signal emitted by the wireless sensor in response to said electromagnetic energy at the first and second frequencies.

AB - This document describes a wireless sensor comprising a MEMS resonator and an antenna directly matched thereto. Also a method of reading the wireless sensor is described. The method comprises illuminating the wireless sensor with electromagnetic energy at a first and second frequencies and receiving an intermodulation signal emitted by the wireless sensor in response to said electromagnetic energy at the first and second frequencies.

M3 - Patent

M1 - US2012176609

ER -

Wireless MEMS sensor and method of reading the same

Abstrakti

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