@article{c9756e0373a6460ab47f427e70a36d66,
title = "Vacancy-type defect distributions of (11)B-, (14)N and (27)Al-implanted 4H-SiC studied by positron annihilation spectroscopy",
keywords = "Defects, Ion implantation, Positron annihilation spectroscopy, Defects, Ion implantation, Positron annihilation spectroscopy, Defects, Ion implantation, Positron annihilation spectroscopy",
author = "M.S. Janson and J. Slotte and A.Yu Kuznetsov and K. Saarinen and A. Hall{\'e}n",
year = "2003",
language = "English",
volume = "433-436",
pages = "641--644",
journal = "Materials Science Forum",
issn = "1662-9760",
publisher = "Trans Tech Publications",
}