@techreport{6135129731db4b67a8ea12fa25972fa4,
title = "Thin film deposition of manganese oxide and lanthanum manganite by the ALE process",
keywords = "atomic layer epitaxy, beta-diketonate, lanthanum manganite, manganese oxide, thin film, atomic layer epitaxy, beta-diketonate, lanthanum manganite, manganese oxide, thin film, atomic layer epitaxy, beta-diketonate, lanthanum manganite, manganese oxide, thin film",
author = "O. Nilsen and M. Peussa and H. Fjellv{\aa}g and L. Niinist{\"o} and A. Kjekshus",
year = "2000",
language = "English",
series = "The 197th meeting of Electrochemical Society, Toronto, Canada, May 14-18, 2000",
pages = "914",
type = "WorkingPaper",
}