@article{e3f93924c7814b4faa2f19768e0f05c4,
title = "The influence of gas-surface interaction on gas-film damping in a silicon accelerometer",
keywords = "accelerometer model, accommodation coefficient, gas-film damping model, squeeze-film damping, accelerometer model, accommodation coefficient, gas-film damping model, squeeze-film damping, accelerometer model, accommodation coefficient, gas-film damping model, squeeze-film damping",
author = "T. Veijola and H. Kuisma and J. Lahdenper{\"a}",
year = "1998",
language = "English",
volume = "A66",
pages = "83--92",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
}