@article{4de2c6b116774b9ab76649b02754b9e0,
title = "The fabrication of silicon nanostructures by focused-ion-beam implantation and TMAH wet etching",
keywords = "FIB implantation, nanofabrication, TMAH wet etching, FIB implantation, nanofabrication, TMAH wet etching, FIB implantation, nanofabrication, TMAH wet etching",
author = "P{\"a}ivi Sievil{\"a} and Nikolai Chekurov and Ilkka Tittonen",
year = "2010",
doi = "10.1088/0957-4484/21/14/145301",
language = "English",
volume = "21",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "Institute of Physics Publishing",
number = "14",
}