Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

Mika Koskenvuori; V. Kaajakari; T. Mattila; I. Tittonen

doi:10.1109/MEMSYS.2008.4443597

Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

Mika Koskenvuori
, V. Kaajakari
, T. Mattila
, I. Tittonen

VTT Technical Research Centre of Finland Ltd.

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

26 Sitaatiot (Scopus)

Alkuperäiskieli	Englanti
Otsikko	IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008
Kustantaja	IEEE
Sivut	1044-1047
ISBN (painettu)	978-1-4244-1792-6
DOI - pysyväislinkit	https://doi.org/10.1109/MEMSYS.2008.4443597
Tila	Julkaistu - 2008
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa
Tapahtuma	IEEE International Conference on Micro Electro Mechanical Systems - Tucson, Yhdysvallat Kesto: 13 tammik. 2008 → 17 tammik. 2008 Konferenssinumero: 21

Julkaisusarja

Nimi	Proceedings : IEEE micro electro mechanical systems
Kustantaja	IEEE
ISSN (painettu)	1084-6999

Conference

Conference	IEEE International Conference on Micro Electro Mechanical Systems
Lyhennettä	MEMS
Maa/Alue	Yhdysvallat
Kaupunki	Tucson
Ajanjakso	13/01/2008 → 17/01/2008

Pääsy asiakirjaan

10.1109/MEMSYS.2008.4443597

Siteeraa tätä

Koskenvuori, M., Kaajakari, V., Mattila, T., & Tittonen, I. (2008). Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator. teoksessa IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008 (Sivut 1044-1047). (Proceedings : IEEE micro electro mechanical systems). IEEE. https://doi.org/10.1109/MEMSYS.2008.4443597

@inproceedings{a97974a87799464b8278f4fa580ad1b4,

title = "Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator",

author = "Mika Koskenvuori and V. Kaajakari and T. Mattila and I. Tittonen",

year = "2008",

doi = "10.1109/MEMSYS.2008.4443597",

language = "English",

isbn = " 978-1-4244-1792-6 ",

series = "Proceedings : IEEE micro electro mechanical systems",

publisher = "IEEE",

pages = "1044--1047",

booktitle = "IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008",

address = "United States",

note = "IEEE International Conference on Micro Electro Mechanical Systems, MEMS ; Conference date: 13-01-2008 Through 17-01-2008",

}

Koskenvuori, M, Kaajakari, V, Mattila, T & Tittonen, I 2008, Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator. julkaisussa IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008. Proceedings : IEEE micro electro mechanical systems, IEEE, Sivut 1044-1047, IEEE International Conference on Micro Electro Mechanical Systems, Tucson, Arizona, Yhdysvallat, 13/01/2008. https://doi.org/10.1109/MEMSYS.2008.4443597

Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator. / Koskenvuori, Mika; Kaajakari, V.; Mattila, T. et al.
IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008. IEEE, 2008. s. 1044-1047 (Proceedings : IEEE micro electro mechanical systems).

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

TY - GEN

T1 - Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

AU - Koskenvuori, Mika

AU - Kaajakari, V.

AU - Mattila, T.

AU - Tittonen, I.

N1 - Conference code: 21

PY - 2008

Y1 - 2008

U2 - 10.1109/MEMSYS.2008.4443597

DO - 10.1109/MEMSYS.2008.4443597

M3 - Conference article in proceedings

SN - 978-1-4244-1792-6

T3 - Proceedings : IEEE micro electro mechanical systems

SP - 1044

EP - 1047

BT - IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008

PB - IEEE

T2 - IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 13 January 2008 through 17 January 2008

ER -