Tabula Rasa: Oxygen precipitate dissolution though rapid high temperature processing in silicon

Erin E. Looney; Hannu S. Laine; Mallory A. Jensen; Amanda Youssef; Vincenzo LaSalvia; Paul Stradins; Tonio Buonassisi

doi:10.1109/PVSC.2017.8366688

Tabula Rasa: Oxygen precipitate dissolution though rapid high temperature processing in silicon

Erin E. Looney^*, Hannu S. Laine, Mallory A. Jensen, Amanda Youssef, Vincenzo LaSalvia, Paul Stradins, Tonio Buonassisi

^*Tämän työn vastaava kirjoittaja

Elektroniikan ja nanotekniikan laitos

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

Abstrakti

Over one fourth of all monocrystalline silicon ingots suffer from a 20% performance degradation due to oxygen precipitates. Tabula Rasa (TR) is a mitigation technique that dissolves these precipitates, making them harmless. This work explores the dependence of oxygen dissolution on annealing time and temperature for the TR process to aid in solar cell process optimization. The dissolution time for oxygen precipitates was found to be more than 10 minutes for total dissolution, longer than normal TR process times in the electronics industry. The activation energy, extracted from the precipitate dissolution curves, is found to be 2.6 +/- 0.5eV. This value when compared to the migration enthalpy of oxygen in silicon can be used to reveal the energy limiting proces in TR.

Alkuperäiskieli	Englanti
Otsikko	2017 IEEE 44TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC)
Kustantaja	IEEE
Sivut	1491-1493
Sivumäärä	3
ISBN (painettu)	978-1-5090-5605-7
DOI - pysyväislinkit	https://doi.org/10.1109/PVSC.2017.8366688
Tila	Julkaistu - 2017
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa
Tapahtuma	IEEE Photovoltaic Specialists Conference - Washington, Yhdysvallat Kesto: 25 kesäk. 2017 → 30 kesäk. 2017 Konferenssinumero: 44

Julkaisusarja

Nimi	IEEE Photovoltaic Specialists Conference
Kustantaja	IEEE
ISSN (painettu)	0160-8371

Conference

Conference	IEEE Photovoltaic Specialists Conference
Lyhennettä	PVSC
Maa/Alue	Yhdysvallat
Kaupunki	Washington
Ajanjakso	25/06/2017 → 30/06/2017

Pääsy asiakirjaan

10.1109/PVSC.2017.8366688

Siteeraa tätä

Looney, E. E., Laine, H. S., Jensen, M. A., Youssef, A., LaSalvia, V., Stradins, P., & Buonassisi, T. (2017). Tabula Rasa: Oxygen precipitate dissolution though rapid high temperature processing in silicon. teoksessa 2017 IEEE 44TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC) (Sivut 1491-1493). (IEEE Photovoltaic Specialists Conference). IEEE. https://doi.org/10.1109/PVSC.2017.8366688

@inproceedings{8be11835dce74bd0ac645673d9526112,

title = "Tabula Rasa: Oxygen precipitate dissolution though rapid high temperature processing in silicon",

abstract = "Over one fourth of all monocrystalline silicon ingots suffer from a 20% performance degradation due to oxygen precipitates. Tabula Rasa (TR) is a mitigation technique that dissolves these precipitates, making them harmless. This work explores the dependence of oxygen dissolution on annealing time and temperature for the TR process to aid in solar cell process optimization. The dissolution time for oxygen precipitates was found to be more than 10 minutes for total dissolution, longer than normal TR process times in the electronics industry. The activation energy, extracted from the precipitate dissolution curves, is found to be 2.6 +/- 0.5eV. This value when compared to the migration enthalpy of oxygen in silicon can be used to reveal the energy limiting proces in TR.",

keywords = "oxygen related defects, monocrystalline silicon, tabula rasa, thin wafering, precipitate dissolution",

author = "Looney, {Erin E.} and Laine, {Hannu S.} and Jensen, {Mallory A.} and Amanda Youssef and Vincenzo LaSalvia and Paul Stradins and Tonio Buonassisi",

year = "2017",

doi = "10.1109/PVSC.2017.8366688",

language = "English",

isbn = "978-1-5090-5605-7",

series = "IEEE Photovoltaic Specialists Conference",

publisher = "IEEE",

pages = "1491--1493",

booktitle = "2017 IEEE 44TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC)",

address = "United States",

note = "IEEE Photovoltaic Specialists Conference, PVSC ; Conference date: 25-06-2017 Through 30-06-2017",

}

Looney, EE, Laine, HS, Jensen, MA, Youssef, A, LaSalvia, V, Stradins, P & Buonassisi, T 2017, Tabula Rasa: Oxygen precipitate dissolution though rapid high temperature processing in silicon. julkaisussa 2017 IEEE 44TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC). IEEE Photovoltaic Specialists Conference, IEEE, Sivut 1491-1493, IEEE Photovoltaic Specialists Conference, Washington, District of Columbia, Yhdysvallat, 25/06/2017. https://doi.org/10.1109/PVSC.2017.8366688

Tabula Rasa: Oxygen precipitate dissolution though rapid high temperature processing in silicon. / Looney, Erin E.; Laine, Hannu S.; Jensen, Mallory A. et al.
2017 IEEE 44TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC). IEEE, 2017. s. 1491-1493 (IEEE Photovoltaic Specialists Conference).

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

TY - GEN

T1 - Tabula Rasa

T2 - IEEE Photovoltaic Specialists Conference

AU - Looney, Erin E.

AU - Laine, Hannu S.

AU - Jensen, Mallory A.

AU - Youssef, Amanda

AU - LaSalvia, Vincenzo

AU - Stradins, Paul

AU - Buonassisi, Tonio

N1 - Conference code: 44

PY - 2017

Y1 - 2017

N2 - Over one fourth of all monocrystalline silicon ingots suffer from a 20% performance degradation due to oxygen precipitates. Tabula Rasa (TR) is a mitigation technique that dissolves these precipitates, making them harmless. This work explores the dependence of oxygen dissolution on annealing time and temperature for the TR process to aid in solar cell process optimization. The dissolution time for oxygen precipitates was found to be more than 10 minutes for total dissolution, longer than normal TR process times in the electronics industry. The activation energy, extracted from the precipitate dissolution curves, is found to be 2.6 +/- 0.5eV. This value when compared to the migration enthalpy of oxygen in silicon can be used to reveal the energy limiting proces in TR.

AB - Over one fourth of all monocrystalline silicon ingots suffer from a 20% performance degradation due to oxygen precipitates. Tabula Rasa (TR) is a mitigation technique that dissolves these precipitates, making them harmless. This work explores the dependence of oxygen dissolution on annealing time and temperature for the TR process to aid in solar cell process optimization. The dissolution time for oxygen precipitates was found to be more than 10 minutes for total dissolution, longer than normal TR process times in the electronics industry. The activation energy, extracted from the precipitate dissolution curves, is found to be 2.6 +/- 0.5eV. This value when compared to the migration enthalpy of oxygen in silicon can be used to reveal the energy limiting proces in TR.

KW - oxygen related defects

KW - monocrystalline silicon

KW - tabula rasa

KW - thin wafering

KW - precipitate dissolution

U2 - 10.1109/PVSC.2017.8366688

DO - 10.1109/PVSC.2017.8366688

M3 - Conference article in proceedings

SN - 978-1-5090-5605-7

T3 - IEEE Photovoltaic Specialists Conference

SP - 1491

EP - 1493

BT - 2017 IEEE 44TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC)

PB - IEEE

Y2 - 25 June 2017 through 30 June 2017

ER -

Tabula Rasa: Oxygen precipitate dissolution though rapid high temperature processing in silicon

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