@article{2297d63f57e74301aa1583d25bd4b48e,
title = "Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition",
keywords = "ALD, precursors, thin films, ALD, precursors, thin films, ALD, precursors, thin films",
author = "Jani P{\"a}iv{\"a}saari and Charles.L. Dezelah and Dwayne Back and El-Kaderi, \{Hani M.\} and Heeg, \{Mary Jane\} and Matti Putkonen and Lauri Niinist{\"o} and Winter, \{Charles H.\}",
year = "2005",
language = "English",
volume = "15",
pages = "4224--4233",
journal = "Chemistry of Materials",
issn = "1520-5002",
publisher = "American Chemical Society",
number = "39",
}