Surface-Tension-Driven Self-Alignment of Microchips on Black-Silicon-Based Hybrid Template in Ambient Air

Tutkimustuotos: Lehtiartikkelivertaisarvioitu

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Bibtex - Lataa

@article{ae48d8e5eab848b6a9e30a23939bb0f5,
title = "Surface-Tension-Driven Self-Alignment of Microchips on Black-Silicon-Based Hybrid Template in Ambient Air",
keywords = "Black silicon , fluoropolymer , hybrid template , self-alignment , self-assembly , solid edge , wetting contrast, Black silicon , fluoropolymer , hybrid template , self-alignment , self-assembly , solid edge , wetting contrast, Black silicon , fluoropolymer , hybrid template , self-alignment , self-assembly , solid edge , wetting contrast",
author = "Ali Shah and Bo Chang and S Suihkonen and Quan Zhou and Harri Lipsanen",
note = "VK: T40102",
year = "2013",
month = "2",
day = "21",
doi = "10.1109/JMEMS.2013.2243109",
language = "English",
volume = "22",
pages = "739--746",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers",
number = "3",

}

RIS - Lataa

TY - JOUR

T1 - Surface-Tension-Driven Self-Alignment of Microchips on Black-Silicon-Based Hybrid Template in Ambient Air

AU - Shah, Ali

AU - Chang, Bo

AU - Suihkonen, S

AU - Zhou, Quan

AU - Lipsanen, Harri

N1 - VK: T40102

PY - 2013/2/21

Y1 - 2013/2/21

KW - Black silicon , fluoropolymer , hybrid template , self-alignment , self-assembly , solid edge , wetting contrast

KW - Black silicon , fluoropolymer , hybrid template , self-alignment , self-assembly , solid edge , wetting contrast

KW - Black silicon , fluoropolymer , hybrid template , self-alignment , self-assembly , solid edge , wetting contrast

UR - http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6468053&contentType=Early+Access+Articles

U2 - 10.1109/JMEMS.2013.2243109

DO - 10.1109/JMEMS.2013.2243109

M3 - Article

VL - 22

SP - 739

EP - 746

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 3

ER -

ID: 859318