Stroboscopic white-light interferometry of vibrating microstructures

Tutkimustuotos: Lehtiartikkelivertaisarvioitu

Tutkijat

Organisaatiot

Kuvaus

We describe a LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz. The data analysis, which is performed entirely in the frequency domain, makes use of the high resolution available in the measured interferometric phase data. For demonstration, we image the surface vibration fields in a square-plate silicon MEMS resonator for three vibration modes ranging in frequency between 3 and 14 MHz. The minimum detectable vibration amplitude in this case was less than 100 pm.

Yksityiskohdat

AlkuperäiskieliEnglanti
Sivut16901-16907
Sivumäärä7
JulkaisuOptics Express
Vuosikerta21
Numero14
TilaJulkaistu - 2013
OKM-julkaisutyyppiA1 Julkaistu artikkeli, soviteltu

    Tutkimusalat

  • Imaging systems, Instrumentation, measurement, and metrology, Interference microscopy, Interferometric imaging, Surface dynamics

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