@techreport{b7172b9d78064903881c6545b2c416ae,
title = "Stability of TaC Diffusion BarrierBetween Si and Cu",
keywords = "diffusion barrier, phase diagrams, tantalum, diffusion barrier, phase diagrams, tantalum, diffusion barrier, phase diagrams, tantalum",
author = "T. Laurila and K. Zeng and J. Molarius and I. Suni and J.K. Kivilahti",
year = "2001",
language = "English",
isbn = "951-22-5777-7",
series = "University Publication Series HUT-EPT-7",
publisher = "TKK, Elektroniikan valmistustekniikan laboratorio",
pages = "25",
type = "WorkingPaper",
institution = "TKK, Elektroniikan valmistustekniikan laboratorio",
}