@inbook{d91e06cf06264ca0936f740b13dd0c78,
title = "Squeeze-film damping models for micromechanical structures",
keywords = "damping, Elmer, FEM, MEMS, squeeze-film damping, damping, Elmer, FEM, MEMS, squeeze-film damping, damping, Elmer, FEM, MEMS, squeeze-film damping",
author = "Timo Veijola",
year = "2005",
language = "English",
isbn = "952-5520-04-8",
pages = "154--157",
booktitle = "CSC Report on Scientific Computing in Finland 2004-2005",
publisher = "CSC - Center for Scientific Computing",
address = "Finland",
}