@inproceedings{0231745422fe4a0cbc820afb61f2cadd,
title = "Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator",
keywords = "micromechanics, rf-mems, micromechanics, rf-mems, micromechanics, rf-mems",
author = "V. Kaajakari and T. Mattila and A. Oja and H. Kattelus and J. Kiiham{\"a}ki and Mika Koskenvuori and P. Rantakari and I. Tittonen and H. Sepp{\"a}",
year = "2003",
language = "English",
pages = "951--954",
booktitle = "Transducers '03, Boston, USA, June, 2003",
publisher = "IEEE",
address = "United States",
}