@inproceedings{4422ebd1963e4676bffef8af468cb5e0,
title = "Silicon nanostructure fabrication by direct FIB writing and TMAH wet chemical etching",
keywords = "FIB implantation, nanofanrication, silicon, TMAH, wet chemical etching, FIB implantation, nanofanrication, silicon, TMAH, wet chemical etching, FIB implantation, nanofanrication, silicon, TMAH, wet chemical etching",
author = "P{\"a}ivi Sievil{\"a} and Nikolai Chekurov and Ilkka Tittonen",
year = "2010",
language = "English",
isbn = "978-1-4398-3402-2",
pages = "214--217",
booktitle = "Nanotech&Expo, Anaheim, CA, USA 21-24 June",
publisher = "CreateSpace",
address = "United States",
}