@article{01c62587edca4a7fa56eef699624147b,
title = "Silicon Nanopillars Formed by Reactive Ion Etching Using Self-Organized Gold Mask",
keywords = "Gold Mask, Nanopillars, RIE, Silicon, Gold Mask, Nanopillars, RIE, Silicon, Gold Mask, Nanopillars, RIE, Silicon",
author = "V. Ovchinnikov and A. Malinin and S. Novikov and C. Tuovinen",
year = "1999",
language = "English",
volume = "T79",
pages = "263--265",
journal = "Physica Scripta",
issn = "1402-4896",
publisher = "Institute of Physics Publishing",
}