@article{0e53adb4751a49d4958da521ebfcd305,
title = "Silicon Micromechanical Resonators for RF- Applications",
keywords = "long-term stability, Micromechanical resonators, phase-noise, long-term stability, Micromechanical resonators, phase-noise, long-term stability, Micromechanical resonators, phase-noise",
author = "Tomi Mattila and Ville Kaajakari and Jyrki Kiiham{\"a}ki and Aarne Oja and Hannu Kattelus and Heikki Sepp{\"a} and Mika Koskenvuori and Pekka Rantakari and Ilkka Tittonen",
year = "2004",
language = "English",
volume = "114",
pages = "181--183",
journal = "Physica Scripta",
issn = "1402-4896",
publisher = "Institute of Physics Publishing",
}