Reducing the Effect of Parasitic Capacitance on MEMS Measurements

P. Rantakari; Jyrki Kiihamäki; Mika Koskenvuori; T. Lamminmäki; I. Tittonen

Reducing the Effect of Parasitic Capacitance on MEMS Measurements

P. Rantakari, Jyrki Kiihamäki, Mika Koskenvuori, T. Lamminmäki, I. Tittonen

Tutkimustuotos: Työpaperi › Working paper › Professional

Alkuperäiskieli	Englanti
Sivut	1556-1559
Tila	Julkaistu - 2001
OKM-julkaisutyyppi	D4 Julkaistu kehittämis- tai tutkimusraportti taikka -selvitys

Julkaisusarja

Nimi	Transducers '01, Eurosensors XV, Munich, Germany, June 10-14, 2001

Tutkimusalat

differential amplifier
miceomechanical resonator
parasitic capasitance

Siteeraa tätä

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title = "Reducing the Effect of Parasitic Capacitance on MEMS Measurements",

keywords = "differential amplifier, miceomechanical resonator, parasitic capasitance, differential amplifier, miceomechanical resonator, parasitic capasitance, differential amplifier, miceomechanical resonator, parasitic capasitance",

author = "P. Rantakari and Jyrki Kiiham{\"a}ki and Mika Koskenvuori and T. Lamminm{\"a}ki and I. Tittonen",

year = "2001",

language = "English",

series = "Transducers '01, Eurosensors XV, Munich, Germany, June 10-14, 2001",

pages = "1556--1559",

type = "WorkingPaper",

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TY - UNPB

T1 - Reducing the Effect of Parasitic Capacitance on MEMS Measurements

AU - Rantakari, P.

AU - Kiihamäki, Jyrki

AU - Koskenvuori, Mika

AU - Lamminmäki, T.

AU - Tittonen, I.

PY - 2001

Y1 - 2001

KW - differential amplifier

KW - miceomechanical resonator

KW - parasitic capasitance

KW - differential amplifier

KW - miceomechanical resonator

KW - parasitic capasitance

KW - differential amplifier

KW - miceomechanical resonator

KW - parasitic capasitance

M3 - Working paper

T3 - Transducers '01, Eurosensors XV, Munich, Germany, June 10-14, 2001

SP - 1556

EP - 1559

BT - Reducing the Effect of Parasitic Capacitance on MEMS Measurements

ER -