Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

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Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces. / Mattila, Päivi; Bosund, Markus; Jussila, Henri; Aierken, Abuduwayiti; Riikonen, Juha; Huhtio, Teppo; Lipsanen, Harri; Sopanen, Markku.

julkaisussa: Applied Surface Science, Vuosikerta 314, 30.09.2014, s. 570-574.

Tutkimustuotos: Lehtiartikkelivertaisarvioitu

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Mattila, Päivi ; Bosund, Markus ; Jussila, Henri ; Aierken, Abuduwayiti ; Riikonen, Juha ; Huhtio, Teppo ; Lipsanen, Harri ; Sopanen, Markku. / Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces. Julkaisussa: Applied Surface Science. 2014 ; Vuosikerta 314. Sivut 570-574.

Bibtex - Lataa

@article{3cc4995bd5334074aa0071343bb1beef,
title = "Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces",
author = "P{\"a}ivi Mattila and Markus Bosund and Henri Jussila and Abuduwayiti Aierken and Juha Riikonen and Teppo Huhtio and Harri Lipsanen and Markku Sopanen",
year = "2014",
month = "9",
day = "30",
doi = "10.1016/j.apsusc.2014.07.024",
language = "English",
volume = "314",
pages = "570--574",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier Science B.V.",

}

RIS - Lataa

TY - JOUR

T1 - Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

AU - Mattila, Päivi

AU - Bosund, Markus

AU - Jussila, Henri

AU - Aierken, Abuduwayiti

AU - Riikonen, Juha

AU - Huhtio, Teppo

AU - Lipsanen, Harri

AU - Sopanen, Markku

PY - 2014/9/30

Y1 - 2014/9/30

U2 - 10.1016/j.apsusc.2014.07.024

DO - 10.1016/j.apsusc.2014.07.024

M3 - Article

VL - 314

SP - 570

EP - 574

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

ER -

ID: 957613