(poster) Unified model for iron gettering in boron- and phosphorus-implanted silicon

Hannu Laine; Ville Vähänissi; Zhengjun Liu; Ernesto Magana; Jan Krugener; Ashley E. Morishige; Kristian Salo; Barry Lai; David P. Fenning; Hele Savin

(poster) Unified model for iron gettering in boron- and phosphorus-implanted silicon

Hannu Laine, Ville Vähänissi, Zhengjun Liu, Ernesto Magana, Jan Krugener, Ashley E. Morishige, Kristian Salo, Barry Lai, David P. Fenning, Hele Savin

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Abstract › Scientific › vertaisarvioitu

Alkuperäiskieli	Englanti
Tila	Julkaistu - 2017
OKM-julkaisutyyppi	Ei oikeutettu
Tapahtuma	Conference on Gettering and Defect Engineering in Semiconductor Technology - Lopota resort, Georgia, Telavi, Georgia Kesto: 1 lokak. 2017 → 6 lokak. 2017 Konferenssinumero: 17

Conference

Conference	Conference on Gettering and Defect Engineering in Semiconductor Technology
Lyhennettä	GADEST
Maa/Alue	Georgia
Kaupunki	Telavi
Ajanjakso	01/10/2017 → 06/10/2017

OpenUrl-saatavuus

Koko teksti

Siteeraa tätä

@conference{8be64ba5248442a8912e0ba7fc28760f,

title = "(poster) Unified model for iron gettering in boron- and phosphorus-implanted silicon",

author = "Hannu Laine and Ville V{\"a}h{\"a}nissi and Zhengjun Liu and Ernesto Magana and Jan Krugener and Morishige, {Ashley E.} and Kristian Salo and Barry Lai and Fenning, {David P.} and Hele Savin",

year = "2017",

language = "English",

note = "Conference on Gettering and Defect Engineering in Semiconductor Technology, GADEST ; Conference date: 01-10-2017 Through 06-10-2017",

}

TY - CONF

T1 - (poster) Unified model for iron gettering in boron- and phosphorus-implanted silicon

AU - Laine, Hannu

AU - Vähänissi, Ville

AU - Liu, Zhengjun

AU - Magana, Ernesto

AU - Krugener, Jan

AU - Morishige, Ashley E.

AU - Salo, Kristian

AU - Lai, Barry

AU - Fenning, David P.

AU - Savin, Hele

N1 - Conference code: 17

PY - 2017

Y1 - 2017

M3 - Abstract

T2 - Conference on Gettering and Defect Engineering in Semiconductor Technology

Y2 - 1 October 2017 through 6 October 2017

ER -