(poster) Sensitivity of Al2O3 Passivation on the Surface Condition Prior to the ALD Process

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Abstract › Scientific

Alkuperäiskieli	Englanti
Tila	Julkaistu - 2013
OKM-julkaisutyyppi	Ei sovellu
Tapahtuma	European Photovoltaic Solar Energy Conference and Exhibition - Paris, Ranska Kesto: 30 syysk. 2013 → 4 lokak. 2013

Conference	European Photovoltaic Solar Energy Conference and Exhibition
Lyhennettä	EU PVSEC
Maa/Alue	Ranska
Kaupunki	Paris
Ajanjakso	30/09/2013 → 04/10/2013

Siteeraa tätä

@conference{f55fc8556e344d438110b1fa8509074b,

title = "(poster) Sensitivity of Al2O3 Passivation on the Surface Condition Prior to the ALD Process",

author = "Shuo Li and P{\"a}ivikki Repo and \{von Gastrow\}, Guillaume and Yameng Bao and Hele Savin",

year = "2013",

language = "English",

note = "European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC ; Conference date: 30-09-2013 Through 04-10-2013",

}