(poster) Re-dissolution of gettered iron impurities in Czochralski-grown silicon

Peng Zhang; Hele Väinölä; A. Istratov; E.R. Weber

(poster) Re-dissolution of gettered iron impurities in Czochralski-grown silicon

Peng Zhang, Hele Väinölä, A. Istratov, E.R. Weber

Sähkötekniikan ja automaation laitos

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Abstract › Scientific › vertaisarvioitu

Alkuperäiskieli	Englanti
Tila	Julkaistu - 2003
OKM-julkaisutyyppi	Ei sovellu
Tapahtuma	Conference on Gettering and Defect Engineering in Semiconductor Technology - Brandenburg, Saksa Kesto: 21 syysk. 2003 → 26 syysk. 2003 Konferenssinumero: 10

Conference

Conference	Conference on Gettering and Defect Engineering in Semiconductor Technology
Maa/Alue	Saksa
Kaupunki	Brandenburg
Ajanjakso	21/09/2003 → 26/09/2003

Tutkimusalat

dissolution
internal gettering
iron
oxygen precipitates
silicon

Siteeraa tätä

@conference{518b283d60cf440a96aeba46efa3af72,

title = "(poster) Re-dissolution of gettered iron impurities in Czochralski-grown silicon",

keywords = "dissolution, internal gettering, iron, oxygen precipitates, silicon, dissolution, internal gettering, iron, oxygen precipitates, silicon, dissolution, internal gettering, iron, oxygen precipitates, silicon",

author = "Peng Zhang and Hele V{\"a}in{\"o}l{\"a} and A. Istratov and E.R. Weber",

year = "2003",

language = "English",

note = "Conference on Gettering and Defect Engineering in Semiconductor Technology ; Conference date: 21-09-2003 Through 26-09-2003",

}

TY - CONF

T1 - (poster) Re-dissolution of gettered iron impurities in Czochralski-grown silicon

AU - Zhang, Peng

AU - Väinölä, Hele

AU - Istratov, A.

AU - Weber, E.R.

N1 - Conference code: 10

PY - 2003

Y1 - 2003

KW - dissolution

KW - internal gettering

KW - iron

KW - oxygen precipitates

KW - silicon

KW - dissolution

KW - internal gettering

KW - iron

KW - oxygen precipitates

KW - silicon

KW - dissolution

KW - internal gettering

KW - iron

KW - oxygen precipitates

KW - silicon

M3 - Abstract

T2 - Conference on Gettering and Defect Engineering in Semiconductor Technology

Y2 - 21 September 2003 through 26 September 2003

ER -