@conference{a5fe7c0f70c747cb91df88ece9d5fd09,
title = "(poster) Detection of low copper contamination in p-type silicon by microwave photoconductive decay measurements",
keywords = "copper, contamination, detection, silicon,, photoconductive decay, copper, contamination, detection, silicon,, photoconductive decay, copper, contamination, detection, silicon,, photoconductive decay",
author = "Marko Yli-Koski and Martti Palokangas and Antti Haarahiltunen and Hele V{\"a}in{\"o}l{\"a} and Jan Storg{\aa}rds and Heikki Holmberg and Juha Sinkkonen",
year = "2002",
language = "English",
note = "International Conference on Defects in Semiconductors, ICDS ; Conference date: 03-06-2002 Through 07-06-2002",
}