Pore formation in inorganic-organic hydrid material by oxygen plasma treatment

Susanna Aura, Ville Jokinen, Marc Baumann, Sami Franssila

Tutkimustuotos: Työpaperi › Working paper › Professional

Alkuperäiskieli	Englanti
Julkaisupaikka	USA
Sivut	461-464
Tila	Julkaistu - 2009
OKM-julkaisutyyppi	D4 Julkaistu kehittämis- tai tutkimusraportti taikka -selvitys

Nimi	The 15th International Conference on solid-state senrors, actuators and microsystems, Denver, USA, June 21-25 2009
Kustantaja	IEEE

Siteeraa tätä

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title = "Pore formation in inorganic-organic hydrid material by oxygen plasma treatment",

author = "Susanna Aura and Ville Jokinen and Marc Baumann and Sami Franssila",

year = "2009",

language = "English",

series = "The 15th International Conference on solid-state senrors, actuators and microsystems, Denver, USA, June 21-25 2009",

publisher = "IEEE",

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TY - UNPB

T1 - Pore formation in inorganic-organic hydrid material by oxygen plasma treatment

AU - Aura, Susanna

AU - Jokinen, Ville

AU - Baumann, Marc

AU - Franssila, Sami

PY - 2009

Y1 - 2009

M3 - Working paper

T3 - The 15th International Conference on solid-state senrors, actuators and microsystems, Denver, USA, June 21-25 2009

SP - 461

EP - 464

BT - Pore formation in inorganic-organic hydrid material by oxygen plasma treatment

CY - USA

ER -