Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation

TY - JOUR

T1 - Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation

AU - Noor, Imtisal e.

AU - Coenen, Jan

AU - Martin, Andrew

AU - Dahl, Olli

PY - 2020/3/18

Y1 - 2020/3/18

N2 - Wastewater from chemical mechanical planarization (CMP) processes in nano-electronics industries must be treated properly in order to fulfil local and international environmental regulations. This study is focused on a performance assessment of membrane distillation (MD) technology for CMP wastewater treatment. A new prototype of air gap membrane distillation (AGMD) module was utilized, with feed water consisting of CMP wastewater collected from imec, Belgium. The module was tested at different operating conditions (temperatures, flow rates and filtration time) and responses in terms of separation efficiency, permeate water quality, transmembrane flux, specific heat demand and exergy efficiency were determined. High quality permeate was produced in all trials, i.e. conductivity ~2.11 µS/cm, pH ~5.4, TOC ~1.13 ppm, IC ~0.24 ppm, TDS ~1.18 ppm and COD ~ 1.9 ppm; for most of the contaminants the separation efficiency was >99%. These findings clearly show that the resulting MD permeate does not exceed environmental regulations for release to recipient, and the permeate can even be considered for reuse. Moreover, the determined specific heat demand at different operating conditions was varying between 1390 and 2170 kWh/m3 whereas; the achievable exergy efficiency was ~19%.

AB - Wastewater from chemical mechanical planarization (CMP) processes in nano-electronics industries must be treated properly in order to fulfil local and international environmental regulations. This study is focused on a performance assessment of membrane distillation (MD) technology for CMP wastewater treatment. A new prototype of air gap membrane distillation (AGMD) module was utilized, with feed water consisting of CMP wastewater collected from imec, Belgium. The module was tested at different operating conditions (temperatures, flow rates and filtration time) and responses in terms of separation efficiency, permeate water quality, transmembrane flux, specific heat demand and exergy efficiency were determined. High quality permeate was produced in all trials, i.e. conductivity ~2.11 µS/cm, pH ~5.4, TOC ~1.13 ppm, IC ~0.24 ppm, TDS ~1.18 ppm and COD ~ 1.9 ppm; for most of the contaminants the separation efficiency was >99%. These findings clearly show that the resulting MD permeate does not exceed environmental regulations for release to recipient, and the permeate can even be considered for reuse. Moreover, the determined specific heat demand at different operating conditions was varying between 1390 and 2170 kWh/m3 whereas; the achievable exergy efficiency was ~19%.

KW - Chemical mechanical planarization

KW - Energy analysis

KW - Membrane distillation

KW - Nano-electronics

KW - Separation efficiency

UR - http://www.scopus.com/inward/record.url?scp=85073547535&partnerID=8YFLogxK

U2 - 10.1016/j.seppur.2019.116201

DO - 10.1016/j.seppur.2019.116201

M3 - Article

VL - 235

JO - Separation and Purification Technology

JF - Separation and Purification Technology

SN - 1383-5866

M1 - 116201

ER -