@techreport{55db071cbcc14cc6a6d9ba7f406c4c95,
title = "Patterning high-temperature superconducting thin films",
keywords = "high-temperature superconductors, photolithography, pulsed laser deposition, superconducting components, thin films, high-temperature superconductors, photolithography, pulsed laser deposition, superconducting components, thin films, high-temperature superconductors, photolithography, pulsed laser deposition, superconducting components, thin films",
author = "J. Meltaus and M. Kiviranta and T. Kajava and M. Salomaa",
year = "1999",
language = "English",
series = "XXXIII Annual Conference of the Finnish Physical Society, Turku, March 4-6, 1999",
publisher = "University of Turku",
pages = "8",
type = "WorkingPaper",
institution = "University of Turku",
}