@article{5eec1bc3d8f547908c426b68cfb4355c,
title = "Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide",
keywords = "Al2O3, black silicon, boron diffusion, surface passivation, Al2O3, black silicon, boron diffusion, surface passivation, Al2O3, black silicon, boron diffusion, surface passivation",
author = "P{\"a}ivikki Repo and Jan Benick and {von Gastrow}, Guillaume and Ville V{\"a}h{\"a}nissi and Heinz, {Friedemann D.} and Jonas Sch{\"o}n and Schubert, {Martin C.} and Hele Savin",
year = "2013",
doi = "10.1002/pssr.201308096",
language = "English",
volume = "7",
pages = "950--954",
journal = "PHYSICA STATUS SOLIDI: RAPID RESEARCH LETTERS",
issn = "1862-6254",
publisher = "WILEY-VCH VERLAG",
number = "11",
}