(oral talk) Gettering of iron in silicon by boron implantation

Antti Haarahiltunen; Heli Talvitie; Hele Savin; O. Anttila; Marko Yli-Koski; M. I. Asghar; Juha Sinkkonen

(oral talk) Gettering of iron in silicon by boron implantation

Antti Haarahiltunen
, Heli Talvitie
, Hele Savin
, O. Anttila
, Marko Yli-Koski
, M. I. Asghar
, Juha Sinkkonen

Electron Physics Group (EPG)

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Abstract › Scientific › vertaisarvioitu

Alkuperäiskieli	Englanti
Tila	Julkaistu - 2007
OKM-julkaisutyyppi	Ei sovellu
Tapahtuma	International Conference on Defects Recognition, Imaging and Physics of Semiconductors - Berlin, Saksa Kesto: 3 syysk. 2007 → 7 syysk. 2007 Konferenssinumero: 11

Conference

Conference	International Conference on Defects Recognition, Imaging and Physics of Semiconductors
Lyhennettä	DRIP
Maa/Alue	Saksa
Kaupunki	Berlin
Ajanjakso	03/09/2007 → 07/09/2007

Tutkimusalat

boron
gettering
iron
silicon

Siteeraa tätä

@conference{5e252fe2f8b9409186b3d60e886b4c78,

title = "(oral talk) Gettering of iron in silicon by boron implantation",

keywords = "boron, gettering, iron, silicon, boron, gettering, iron, silicon, boron, gettering, iron, silicon",

author = "Antti Haarahiltunen and Heli Talvitie and Hele Savin and O. Anttila and Marko Yli-Koski and Asghar, \{M. I.\} and Juha Sinkkonen",

year = "2007",

language = "English",

note = "International Conference on Defects Recognition, Imaging and Physics of Semiconductors, DRIP ; Conference date: 03-09-2007 Through 07-09-2007",

}

TY - CONF

T1 - (oral talk) Gettering of iron in silicon by boron implantation

AU - Haarahiltunen, Antti

AU - Talvitie, Heli

AU - Savin, Hele

AU - Anttila, O.

AU - Yli-Koski, Marko

AU - Asghar, M. I.

AU - Sinkkonen, Juha

N1 - Conference code: 11

PY - 2007

Y1 - 2007

KW - boron

KW - gettering

KW - iron

KW - silicon

KW - boron

KW - gettering

KW - iron

KW - silicon

KW - boron

KW - gettering

KW - iron

KW - silicon

M3 - Abstract

T2 - International Conference on Defects Recognition, Imaging and Physics of Semiconductors

Y2 - 3 September 2007 through 7 September 2007

ER -