@conference{93768425eb88409ab1136e7553bfd28f,
title = "(oral talk) Gettering in silicon-on-insulator wafers with polysilicon layer",
keywords = "Buried oxides, Device layers, Dissolved irons, Front surfaces, Gettering; Iron gettering, Polysilicon layers; Precipitation, Processing conditions, Segregation, Silicon-on-insulator, Silicon-on-insulator wafers, Soi wafers, Buried oxides, Device layers, Dissolved irons, Front surfaces, Gettering; Iron gettering, Polysilicon layers; Precipitation, Processing conditions, Segregation, Silicon-on-insulator, Silicon-on-insulator wafers, Soi wafers, Buried oxides, Device layers, Dissolved irons, Front surfaces, Gettering; Iron gettering, Polysilicon layers; Precipitation, Processing conditions, Segregation, Silicon-on-insulator, Silicon-on-insulator wafers, Soi wafers",
author = "Hele Savin and Marko Yli-Koski and Antti Haarahiltunen and Ville Virkkala and Heli Talvitie and Asghar, \{M. I.\} and Juha Sinkkonen",
year = "2008",
language = "English",
note = "European Materials Research Society Spring Meeting, E-MRS ; Conference date: 26-05-2008 Through 30-05-2008",
}