@misc{00f55761f62f4af7b14ad071fa9bfc4e,
title = "Optical waveguide for integrated optical circuit and method for producing the optical waveguide",
keywords = "integrated optical circuit, integrated optics, multi-step patterning, optical waveguide, silicon on insulator, waveguide bend, integrated optical circuit, integrated optics, multi-step patterning, optical waveguide, silicon on insulator, waveguide bend, integrated optical circuit, integrated optics, multi-step patterning, optical waveguide, silicon on insulator, waveguide bend",
author = "Timo Aalto",
year = "2003",
language = "English",
type = "Patent",
note = "Kansainv{\"a}linen patentti, WO 03/985429 A1",
}