Optical Coating Fabricated by Atomic Layer Deposition

Päivi Sievilä, Nikolai Chekurov, Ossi Kimmelma, Ilkka Tittonen

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

Alkuperäiskieli	Englanti
Otsikko	The XLII Annual Conference of the Finnish Physical Society, Turku 2008.
Tila	Julkaistu - 2008
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa

Tutkimusalat

@inproceedings{bdae974b8afc4b649fe56a96343ec1ea,

title = "Optical Coating Fabricated by Atomic Layer Deposition",

keywords = "ALD, Coating, Optical, ALD, Coating, Optical, ALD, Coating, Optical",

author = "P{\"a}ivi Sievil{\"a} and Nikolai Chekurov and Ossi Kimmelma and Ilkka Tittonen",

year = "2008",

language = "English",

booktitle = "The XLII Annual Conference of the Finnish Physical Society, Turku 2008.",

}

TY - GEN

T1 - Optical Coating Fabricated by Atomic Layer Deposition

AU - Sievilä, Päivi

AU - Chekurov, Nikolai

AU - Kimmelma, Ossi

AU - Tittonen, Ilkka

PY - 2008

Y1 - 2008

KW - ALD

KW - Coating

KW - Optical

KW - ALD

KW - Coating

KW - Optical

KW - ALD

KW - Coating

KW - Optical

M3 - Conference article in proceedings

BT - The XLII Annual Conference of the Finnish Physical Society, Turku 2008.

ER -