@inproceedings{8545d1a6e7124da2b10981d1e1e3692b,
title = "Novel method for analysing signal errors caused by polygonal approximations in the fabrication of diffractive elements",
keywords = "diffractive optics, polygon coding, scalar diffraction, signal errors, diffractive optics, polygon coding, scalar diffraction, signal errors, diffractive optics, polygon coding, scalar diffraction, signal errors",
author = "I. Kallioniemi and J. Saarinen and K. Blomstedt and J. Turunen",
year = "1997",
language = "English",
pages = "223--230",
editor = "Parriaux, \{O. M.\} and E.-B. Kley and B. Culshaw and M. Breidne",
booktitle = "Micro-optical Technologies for Measurement, Sensors, and Microsystems II, M{\"u}nchen, Saksa, 18.6-20.6.1997",
publisher = "SPIE",
address = "United States",
}