@article{8a223614040b4ff4a94f98136423e49e,
title = "Non-tilting out-of-plane mode high-Q mechanical silicon oscillator as a moving cavity mirror",
keywords = "high-Q-mechanical oscillator, microsystems, high-Q-mechanical oscillator, microsystems, high-Q-mechanical oscillator, microsystems",
author = "Ossi Hahtela and Ilkka Tittonen",
year = "2007",
language = "English",
volume = "88",
pages = "417--423",
journal = "Applied Physics B: Lasers and Optics",
issn = "1432-0649",
publisher = "Springer",
number = "3",
}