@inproceedings{83428d0d42a54b67b3b2c2eed0a98518,
title = "Nanostructures by Atomic Layer Deposition: Controlling and Combining Materials at Atomic and Molecular Level",
keywords = "Atomic layer deposition, oxide thin films, porous membranes, Atomic layer deposition, oxide thin films, porous membranes, Atomic layer deposition, oxide thin films, porous membranes",
author = "Lauri Niinist{\"o} and Matti Putkonen and Pia Myllym{\"a}ki and Eero Iiskola",
year = "2005",
language = "English",
booktitle = "European Science Foundation workshop, Nanowires: Bridging the gap between Material Science and Biology, Bad Hofgastein, Austria 26. - 28. May 2005",
}