Nanostructured germanium with >99% absorption at 300-1600 nm wavelengths

Toni Pasanen, Joonas Isometsä, Moises Garin, Kexun Chen, Ville Vähänissi, Hele Savin

Tutkimustuotos: LehtiartikkeliArticleScientificvertaisarvioitu

26 Sitaatiot (Scopus)
67 Lataukset (Pure)

Abstrakti

Near-infrared (NIR) sensors find numerous applications within various industry fields, including optical communications and medical diagnostics. However, the state-of-the-art NIR sensors made of germanium (Ge) suffer from rather poor response, largely due to high reflection from the illuminated device surface. This work demonstrates a method to increase the sensitivity of Ge sensors by implementing nanostructures to the wafer surfaces. The absorbance of nanostructured Ge wafers is measured to be >99% in the whole UV–vis–NIR spectrum up to 1600 nm wavelength, which is a significant improvement to bare Ge wafers that reach absorption of only 63% in maximum. The process is shown to be capable of producing uniform nanostructures covering full 100 mm diameter substrates as well as wafers with etch mask openings of different sizes and shapes, which demonstrates its applicability to complementary metal oxide semiconductor (CMOS) sensor manufacturing. The results imply that nanostructured Ge has potential to revolutionize the sensitivity of Ge-based sensors.

AlkuperäiskieliEnglanti
Artikkeli2000047
Sivumäärä5
JulkaisuAdvanced Optical Materials
Vuosikerta8
Numero11
Varhainen verkossa julkaisun päivämäärä29 maalisk. 2020
DOI - pysyväislinkit
TilaJulkaistu - 1 kesäk. 2020
OKM-julkaisutyyppiA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

Sormenjälki

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  • Superior infrared sensors

    Savin, H. (Vastuullinen tutkija) & Pasanen, T. (Projektin jäsen)

    29/01/202128/01/2023

    Projekti: Domestic funds and foundations

  • ATTRACT SUGER

    Savin, H. (Vastuullinen tutkija)

    01/05/201931/10/2020

    Projekti: EU: Framework programmes funding

  • RaPtor: RaPtor - Radiation and photo detector technologies RapTor

    Savin, H. (Vastuullinen tutkija)

    01/04/201931/05/2022

    Projekti: Business Finland: Other research funding

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