Projekteja vuodessa
Abstrakti
Near-infrared (NIR) sensors find numerous applications within various industry fields, including optical communications and medical diagnostics. However, the state-of-the-art NIR sensors made of germanium (Ge) suffer from rather poor response, largely due to high reflection from the illuminated device surface. This work demonstrates a method to increase the sensitivity of Ge sensors by implementing nanostructures to the wafer surfaces. The absorbance of nanostructured Ge wafers is measured to be >99% in the whole UV–vis–NIR spectrum up to 1600 nm wavelength, which is a significant improvement to bare Ge wafers that reach absorption of only 63% in maximum. The process is shown to be capable of producing uniform nanostructures covering full 100 mm diameter substrates as well as wafers with etch mask openings of different sizes and shapes, which demonstrates its applicability to complementary metal oxide semiconductor (CMOS) sensor manufacturing. The results imply that nanostructured Ge has potential to revolutionize the sensitivity of Ge-based sensors.
Alkuperäiskieli | Englanti |
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Artikkeli | 2000047 |
Sivumäärä | 5 |
Julkaisu | Advanced Optical Materials |
Vuosikerta | 8 |
Numero | 11 |
Varhainen verkossa julkaisun päivämäärä | 29 maalisk. 2020 |
DOI - pysyväislinkit | |
Tila | Julkaistu - 1 kesäk. 2020 |
OKM-julkaisutyyppi | A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä |
Sormenjälki
Sukella tutkimusaiheisiin 'Nanostructured germanium with >99% absorption at 300-1600 nm wavelengths'. Ne muodostavat yhdessä ainutlaatuisen sormenjäljen.Projektit
- 4 Päättynyt
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Superior infrared sensors
Savin, H. (Vastuullinen tutkija) & Pasanen, T. (Projektin jäsen)
29/01/2021 → 28/01/2023
Projekti: Domestic funds and foundations
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ATTRACT SUGER
Savin, H. (Vastuullinen tutkija)
01/05/2019 → 31/10/2020
Projekti: EU: Framework programmes funding
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RaPtor: RaPtor - Radiation and photo detector technologies RapTor
Savin, H. (Vastuullinen tutkija)
01/04/2019 → 31/05/2022
Projekti: Business Finland: Other research funding
Laitteet
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OtaNano Nanomikroskopiakeskus
Seitsonen, J. (Manager) & Rissanen, A. (Other)
OtaNanoLaitteistot/tilat: Facility