@inproceedings{0a02bd0ac7c84fb28c96d5c74966dfd5,
title = "Modeling and optimization of internal gettering of iron in silicon",
keywords = "internal gettering, iron, silicon, simulation, internal gettering, iron, silicon, simulation, internal gettering, iron, silicon, simulation",
author = "Antti Haarahiltunen and {V{\"a}in{\"o}l{\"a} (Savin)}, Hele and Olli Anttila and Marko Yli-Koski and Juha Sinkkonen",
year = "2006",
language = "English",
isbn = "19385-862",
volume = "3",
pages = "273--278",
editor = "Claeys, {C. L. } and M. Watanabe and Falster, {R. } and P. Stallhofer",
booktitle = "ECS Transactions",
publisher = "Electrochemical Society",
address = "United States",
note = "Electrochemical Society Meeting, ECS ; Conference date: 29-10-2006 Through 03-11-2006",
}