@techreport{7873095b21e644659626ecac3cdbcef3,
title = "Model for GAS Film Damping in a Silicon Accelerometer",
keywords = "accelerometer model, effective viscosity, gas film damping, rarefied gas flow, accelerometer model, effective viscosity, gas film damping, rarefied gas flow, accelerometer model, effective viscosity, gas film damping, rarefied gas flow",
author = "T. Veijola and H. Kuisma and Juha Lahdenper{\"a}",
year = "1997",
language = "English",
isbn = "951-22-3776-8",
series = "Circuit Theory Laboratory Report Series",
publisher = "Helsinki University of Technology, Circuit Theory Laboratory",
number = "CT-29",
pages = "27",
type = "WorkingPaper",
institution = "Helsinki University of Technology, Circuit Theory Laboratory",
}