@inproceedings{63a91391f1a74e5abb5cd7aa9cca01d9,
title = "Mode properties of ALD filled slot waveguides",
keywords = "integrated optics, Nonlinear optics, silicon-on-insulator, integrated optics, Nonlinear optics, silicon-on-insulator, integrated optics, Nonlinear optics, silicon-on-insulator",
author = "Antti S{\"a}yn{\"a}tjoki and Tapani Alasaarela and Amit Khanna and Ari Tervonen and Seppo Honkanen",
year = "2010",
doi = "10.1117/12.842262",
language = "English",
isbn = "9780819474582",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "\{Joel A. Kubby\}, \{Graham T. Reed\}",
booktitle = "SPIE Photonics West 2010, San Francisco, CA, USA, 24 Jan 2010",
address = "United States",
}