Micromechanical characterization of ALD thin films

Material Science

• Adhesion 11%
• Al2O3 22%
• Characterization 100%
• Coating 22%
• Composite Material 5%
• Devices 11%
• Elastic Constant 5%
• Glass 5%
• Interface Property 5%
• Material 5%
• Mechanical Property 50%
• Mechanical Strength 11%
• Membrane 16%
• Microelectromechanical System 100%
• Oxide 5%
• Residual Stress 11%
• Scratch Testing 5%
• Shaft 27%
• Solution 5%
• Sputtered Film 5%
• Thin Films 100%

Engineering

• Atomic Layer 100%
• Chemical Sensor 11%
• Coating 22%
• Critical Load 5%
• Debonding 11%
• Deposited Film 11%
• Evaluation 5%
• Events 5%
• Extraction 16%
• Fracture 16%
• Glass Substrate 5%
• Good Mechanical Property 11%
• Graphene 11%
• Mechanical Load 5%
• Mechanical Properties 38%
• Membrane 16%
• Microsphere 22%
• Piercing 5%
• Repeatability 5%
• Requirements 5%
• Sphere 11%
• Stress Condition 5%
• Substrates 16%
• System Structure 5%
• Testing 5%
• Thin Films 100%
• Titanium Dioxide 22%
• Windows 5%