@techreport{a840929996d14eeb98ca728b02dc816d,
title = "Method for phase sensitive measurements of surface vibrations using homodyne interferometry without stabilization",
keywords = "BAW, laser interferometry, MEMS, Michelson interferometer, SAW, BAW, laser interferometry, MEMS, Michelson interferometer, SAW, BAW, laser interferometry, MEMS, Michelson interferometer, SAW",
author = "Lauri Lipi{\"a}inen and Kimmo Kokkonen and Olli Holmgren and Matti Kaivola",
year = "2009",
language = "English",
series = "IEEE International Ultrasonics Symposium, Rome, September 19-23, 2009",
pages = "1652--1655",
type = "WorkingPaper",
}