Mechanical silicon resonators for RF electronics

Mika Koskenvuori, T. Lamminmäki, P. Rantakari, I. Tittonen

Tutkimustuotos: Työpaperi › Working paper › Professional

Alkuperäiskieli	Englanti
Sivut	111
Tila	Julkaistu - 2001
OKM-julkaisutyyppi	D4 Julkaistu kehittämis- tai tutkimusraportti taikka -selvitys

Nimi	XXXV Annual Conference of the Finnish Physical Society, Jyvaskyla, Finland, March 22-24, 2001

Tutkimusalat

@techreport{5646ce566d7c4e108f8fbd4d7f0d9c4b,

title = "Mechanical silicon resonators for RF electronics",

keywords = "RF mems, silicon resonators, RF mems, silicon resonators, RF mems, silicon resonators",

author = "Mika Koskenvuori and T. Lamminm{\"a}ki and P. Rantakari and I. Tittonen",

year = "2001",

language = "English",

series = "XXXV Annual Conference of the Finnish Physical Society, Jyvaskyla, Finland, March 22-24, 2001",

pages = "111",

type = "WorkingPaper",

}

TY - UNPB

T1 - Mechanical silicon resonators for RF electronics

AU - Koskenvuori, Mika

AU - Lamminmäki, T.

AU - Rantakari, P.

AU - Tittonen, I.

PY - 2001

Y1 - 2001

KW - RF mems

KW - silicon resonators

KW - RF mems

KW - silicon resonators

KW - RF mems

KW - silicon resonators

M3 - Working paper

T3 - XXXV Annual Conference of the Finnish Physical Society, Jyvaskyla, Finland, March 22-24, 2001

SP - 111

BT - Mechanical silicon resonators for RF electronics

ER -