@techreport{c2261369ea5d441da243b0d7f4e62b8e,
title = "Macropore formation in multilayer films",
keywords = "a-Si multilayers, hydrogen bubbles, macropore, PECVD, plasma treatment, a-Si multilayers, hydrogen bubbles, macropore, PECVD, plasma treatment, a-Si multilayers, hydrogen bubbles, macropore, PECVD, plasma treatment",
author = "Victor Ovchinnikov",
year = "2004",
language = "English",
series = "16th International Vacuum Congress, Venice, Italy, 28.6.-2.7.2004",
publisher = "IUVSTA - International Union for Vacuum Science, Technique and Application",
pages = "Book 2, s. 746",
type = "WorkingPaper",
institution = "IUVSTA - International Union for Vacuum Science, Technique and Application",
}