@inproceedings{070088b6b3d8451491077412108696a6,
title = "Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films",
author = "Lasse Karvonen and Antti S{\"a}yn{\"a}tjoki and Xiaoguang Tu and Tsung-Yang Liow and Marianne Hiltunen and Jussi Hiltunen and Ari Tervonen and Guo-Qiang Lo and Seppo Honkanen",
year = "2012",
doi = "10.1117/12.921805",
language = "English",
pages = "Paper 8431--57",
booktitle = "Photonics Europe 2012: Conference on Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, April 16-19, 2012",
}