@article{d2eaed705bbd49aab755d273e81e0800,
title = "Long-term stability of single-crystal silicon microresonators",
keywords = "Aging, Long-term stability, Micromechanical resonator, Packaging, Vacuum encapsulation, Aging, Long-term stability, Micromechanical resonator, Packaging, Vacuum encapsulation, Aging, Long-term stability, Micromechanical resonator, Packaging, Vacuum encapsulation",
author = "Mika Koskenvuori and Tomi Mattila and Ari H{\"a}{\"a}r{\"a} and Jyrki Kiiham{\"a}ki and Aarne Oja and Heikki Sepp{\"a} and Ilkka Tittonen",
year = "2004",
doi = "10.1016/j.sna.2004.03.013",
language = "English",
volume = "115",
pages = "23--27",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
}