@techreport{fc234c5deb9c4488bca9214133cd1772,
title = "Linear out-of-plane mode high-Q mechanical silicon oscillator",
keywords = "high-Q mechanical oscillator, microsystems, single-crystal silicon, high-Q mechanical oscillator, microsystems, single-crystal silicon, high-Q mechanical oscillator, microsystems, single-crystal silicon",
author = "Ossi Hahtela and Nikolai Chekurov and Ilkka Tittonen",
year = "2005",
language = "English",
isbn = "951-22-7555-4",
series = "XXXIX Annual Conference of the Finnish Physical Society, Espoo, March 17-19",
pages = "148",
type = "WorkingPaper",
}