@techreport{7595831801204ebe81814b9fa35241fa,
title = "Light metrology based on inverse scattering analysis and artificial neural networks",
keywords = "diffraction gratings, diffractive optics, micro-optics, rigorous diffraction theory, diffraction gratings, diffractive optics, micro-optics, rigorous diffraction theory, diffraction gratings, diffractive optics, micro-optics, rigorous diffraction theory",
author = "J. Saarinen and E. Noponen and E. Oja and O. Simula",
year = "1997",
language = "English",
series = "Optics Day '97, Tampere, 21.3.1997",
publisher = "Finnish Optical Society",
type = "WorkingPaper",
institution = "Finnish Optical Society",
}