Laser-Assisted Mist Capillary Self-Alignment

Tutkimustuotos: Lehtiartikkelivertaisarvioitu

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Laser-Assisted Mist Capillary Self-Alignment. / Chang, Bo; Zhu , Zhaofei ; Koverola, Mikko; Zhou, Quan.

julkaisussa: MICROMACHINES, Vuosikerta 8, Nro 12, 361, 15.12.2017, s. 1-10.

Tutkimustuotos: Lehtiartikkelivertaisarvioitu

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Chang, B, Zhu , Z, Koverola, M & Zhou, Q 2017, 'Laser-Assisted Mist Capillary Self-Alignment', MICROMACHINES, Vuosikerta. 8, Nro 12, 361, Sivut 1-10. https://doi.org/10.3390/mi8120361

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Author

Chang, Bo ; Zhu , Zhaofei ; Koverola, Mikko ; Zhou, Quan. / Laser-Assisted Mist Capillary Self-Alignment. Julkaisussa: MICROMACHINES. 2017 ; Vuosikerta 8, Nro 12. Sivut 1-10.

Bibtex - Lataa

@article{cee9baf28d15440f882d812a19f0d3a2,
title = "Laser-Assisted Mist Capillary Self-Alignment",
abstract = "This paper reports a method combining laser die transfer and mist capillary self-alignment. The laser die transfer technique is employed to feed selected microchips from a thermal release tape onto a receiving substrate and mist capillary self-alignment is applied to align the microchips to the predefined receptor sites on the substrate in high-accuracy. The parameters for a low-power laser die transfer process have been investigated and experimentally optimized. The acting forces during the mist-induced capillary self-alignment process have been analyzed and the critical volume enabling capillary self-alignment has been estimated theoretically and experimentally. We have demonstrated that microchips can be transferred onto receptor sites in 300–400 ms using a low-power laser (100 mW), and chips can self-align to the corresponding receptor sites in parallel with alignment accuracy of 1.4 ± 0.8 μm. The proposed technique has great potential in high-throughput and high-accuracy assembly of micro devices. This paper is extended from an early conference paper (MARSS 2017)",
keywords = "mist capillary self-alignment, laser die transfer, hydrophilic/superhydrophobic patterned surfaces, microasssembly",
author = "Bo Chang and Zhaofei Zhu and Mikko Koverola and Quan Zhou",
year = "2017",
month = "12",
day = "15",
doi = "10.3390/mi8120361",
language = "English",
volume = "8",
pages = "1--10",
journal = "MICROMACHINES",
issn = "2072-666X",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "12",

}

RIS - Lataa

TY - JOUR

T1 - Laser-Assisted Mist Capillary Self-Alignment

AU - Chang, Bo

AU - Zhu , Zhaofei

AU - Koverola, Mikko

AU - Zhou, Quan

PY - 2017/12/15

Y1 - 2017/12/15

N2 - This paper reports a method combining laser die transfer and mist capillary self-alignment. The laser die transfer technique is employed to feed selected microchips from a thermal release tape onto a receiving substrate and mist capillary self-alignment is applied to align the microchips to the predefined receptor sites on the substrate in high-accuracy. The parameters for a low-power laser die transfer process have been investigated and experimentally optimized. The acting forces during the mist-induced capillary self-alignment process have been analyzed and the critical volume enabling capillary self-alignment has been estimated theoretically and experimentally. We have demonstrated that microchips can be transferred onto receptor sites in 300–400 ms using a low-power laser (100 mW), and chips can self-align to the corresponding receptor sites in parallel with alignment accuracy of 1.4 ± 0.8 μm. The proposed technique has great potential in high-throughput and high-accuracy assembly of micro devices. This paper is extended from an early conference paper (MARSS 2017)

AB - This paper reports a method combining laser die transfer and mist capillary self-alignment. The laser die transfer technique is employed to feed selected microchips from a thermal release tape onto a receiving substrate and mist capillary self-alignment is applied to align the microchips to the predefined receptor sites on the substrate in high-accuracy. The parameters for a low-power laser die transfer process have been investigated and experimentally optimized. The acting forces during the mist-induced capillary self-alignment process have been analyzed and the critical volume enabling capillary self-alignment has been estimated theoretically and experimentally. We have demonstrated that microchips can be transferred onto receptor sites in 300–400 ms using a low-power laser (100 mW), and chips can self-align to the corresponding receptor sites in parallel with alignment accuracy of 1.4 ± 0.8 μm. The proposed technique has great potential in high-throughput and high-accuracy assembly of micro devices. This paper is extended from an early conference paper (MARSS 2017)

KW - mist capillary self-alignment

KW - laser die transfer

KW - hydrophilic/superhydrophobic patterned surfaces

KW - microasssembly

U2 - 10.3390/mi8120361

DO - 10.3390/mi8120361

M3 - Article

VL - 8

SP - 1

EP - 10

JO - MICROMACHINES

JF - MICROMACHINES

SN - 2072-666X

IS - 12

M1 - 361

ER -

ID: 16431423