@inproceedings{e8c290a69dd04fd5bb41aec18dcdecc4,
title = "Large-Displacement Modelling and Simulation of Micromechanical Electrostatically Driven Resonators Using the Harmonic Balance Method",
keywords = "beam resonator, elongation stress, equivalent circuit model, harmonic balance method, micromechanics, beam resonator, elongation stress, equivalent circuit model, harmonic balance method, micromechanics, beam resonator, elongation stress, equivalent circuit model, harmonic balance method, micromechanics",
author = "T. Veijola and T. Mattila and O. Jaakkola and J. Kiiham{\"a}ki and T. Lamminm{\"a}ki and A. Oja and K. Ruokonen and H. Sepp{\"a} and Pekka Sepp{\"a}l{\"a} and I. Tittonen",
year = "2000",
language = "English",
pages = "99--102",
editor = "Thomas Perkins and John Wendler",
booktitle = "2000 IEEE MTT-S International Microwave Symposium, Boston, 11-16.6.2000",
}