@article{1d4f45308ff64e28b43e5e69b7c2bf5a,
title = "Investigation of Structural Defects in 4H SiC Wafers",
keywords = "defects, silicon carbide, synchrotron x-ray topography and diffraction, defects, silicon carbide, synchrotron x-ray topography and diffraction, defects, silicon carbide, synchrotron x-ray topography and diffraction",
author = "M. Tuominen and R. Yakimova and R.C. Glass and T. Tuomi and E. Janzen",
year = "1994",
language = "English",
volume = "339",
pages = "729--734",
journal = "Materials Research Society Symposia Proceedings",
issn = "0272-9172",
publisher = "Springer",
}