@techreport{7da3598b3f1340d9a83d6b1b4c80528c,
title = "Interferometric determination of mechanical susceptibility of a silicon oscillator",
keywords = "Fabry-Perot interferometer, mechanical susceptibility, micromechanical oscillator, optical measurement, Fabry-Perot interferometer, mechanical susceptibility, micromechanical oscillator, optical measurement, Fabry-Perot interferometer, mechanical susceptibility, micromechanical oscillator, optical measurement",
author = "O. Hahtela and K. Lahti and K. Nera and E. Vahala and I. Tittonen",
year = "2001",
language = "English",
series = "Optics Days 2001, Tampere, Finland, April 20-21, 2001",
pages = "s. P6",
type = "WorkingPaper",
}